Improved thin film growth using Slow Kinetics Intermittent Sputtering

Data repository for the paper published in Applied Surface Science.

    Organizational unit
    Paruch Group
    Type
    Dataset
    DOI
    10.26037/yareta:wdmelj7tcrgshkc4eina32jl2e
    Embargo access level
    Closed
    Embargo end date
    13/09/2020
    License
    Creative Commons Attribution 4.0
Publication date13/03/2020
Retention date11/03/2030
accessLevelPublicAccess levelPublic
SensitivityUndefined
duaNoneContract on the use of data
Contributors
  • Weymann, Christian
  • Fernandez-Peña, Stépanie
  • Paruch, Patrycja
  • Lichtensteiger, Céline
  • Cordero-Eduards, Kumara
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